LP-57C

PRIMARY POLISHING PAD – Unfilled

The LP-57C is an unfilled, small pore size polyurethane pad. (modified version of LP-57) It is designed for silicon wafer primary polishing but has proven suitable for general polishing applications at moderate or higher pressures.

BENEFITS

Very stable performance
Low edge roll-off
Long life
Low noise and vibration

TYPICAL APPLICATIONS

Silicon

LP-57C PAD PROPERTIES (Average)

FILLER

DENSITY [g/cm³ (lb/ft³)]

HARDNESS (Shore A)

COMPRESSIBILITY (%)

ELASTIC REBOUND (%)

None

0.53 (33.0)

88

8.0

92

FILLER: None

DENSITY [g/cm³ (lb/ft³)]: 0.53 (33.0)

HARDNESS (Shore A): 88

COMPRESSIBILITY (%): 8.0

ELASTIC REBOUND (%): 92

Values are subject to change without notification.