M-25

PRIMARY POLISHING PAD – Unfilled

The M-25 is an unfilled, small pore size polyurethane pad. (Modified version of LP-57)
It is designed for reduced defects during silicon wafer primary polishing.

BENEFITS

High stock removal rate
Low pad wear
Low defect level

TYPICAL APPLICATIONS


Sapphire, Silicon

 

 

M-25 PAD PROPERTIES (Average)

FILLER

DENSITY
[g/cm³ (lb/ft³)]

HARDNESS
(Shore A)

COMPRESSIBILITY
(%)

ELASTIC REBOUND
(%)

None

0.42 (26.0)

89

7.5

90

Values are subject to change without notification.