LP-57C

PRIMARY POLISHING PAD – Unfilled

The LP-57C is an unfilled, small pore size polyurethane pad. (modified version of LP-57) It is designed for silicon wafer primary polishing but has proven suitable for general polishing applications at moderate or higher pressures.

BENEFITS

Very stable performance
Low edge roll-off
Long life
Low noise and vibration


TYPICAL APPLICATIONS

Silicon

 

LP-57C PAD PROPERTIES (Average)

FILLER

DENSITY
[g/cm³ (lb/ft³)]

HARDNESS
(Shore A)

COMPRESSIBILITY
(%)

ELASTIC REBOUND
(%)

None

0.53 (33.0)

88

8.0

92

Values are subject to change without notification.