LP-57

PRIMARY POLISHING PAD – Unfilled

The LP-57 is an unfilled, small pore size polyurethane pad.
It is designed for silicon wafer primary polishing but has proven suitable for general polishing applications at moderate or higher pressures.

BENEFITS

Short break-in period

TYPICAL APPLICATIONS


Semiconductor wafers, primary polishing, Sapphire, final polishing, Precision Optics,
Quartz, Glass, primary & single step polishing, Metals, single step polishing,
CMP-Titanium, Alumina

 

LP-57 PAD PROPERTIES (Average)

FILLER

DENSITY
[g/cm³ (lb/ft³)]

HARDNESS
(Shore A)

COMPRESSIBILITY
(%)

ELASTIC REBOUND
(%)

None

0.51 (32.0)

88

7.6

92

Values are subject to change without notification.