ESM-013

SEMICONDUCTOR POLISHING PAD – Unfilled

ESM-013 is an unfilled semiconductor polishing pad.

BENEFITS

High stock rate with dense ceramics

TYPICAL APPLICATIONS

Precision Optics
Silicon
Semiconductor Substrate

 

ESM-013 PAD PROPERTIES (Average)

FILLER

DENSITY
[g/cm³ (lb/ft³)]

HARDNESS
(Shore A)

COMPRESSIBILITY
(%)

ELASTIC REBOUND
(%)

None

0.59 (37.0)

88

9.3

93

Values are subject to change without notification.